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We summarized The present improvement position in the higher-ability DUV laser equally in the wavelength of FHG of your 1-μm laser and at 193 nm. The the latest progress on the strong-point out/fiber laser, plus the nonlinear optical crystals, prompts not only the standard electrical power but also the beam excellent (coherence) of the DUV lasers to an unprecedented level.
As an illustration, The existing concave OC could be replaced by a airplane mirror which could mitigate the power density on the surface of M1 and the diamond. Also, utilizing higher problems threshold coatings for M1 and diamond would also improve the output electrical power with no damages. Then, the NIR laser within the 2nd Stokes wavelength might be large ample, as well as its excellent beam good quality, to crank out the ultimate DUV laser at 193 nm with a significant average ability.
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A result of the thermal lens result while in the strong-point out lasers, In case the heating management is inadequate, It's not easy to get the strong-point out laser having a substantial energy in addition to a large beam high-quality simultaneously. Not long ago, with the event of The skinny disk laser and single-crystal fiber (SCF) laser, a substantial-power laser at the basic wavelength (1 μm) had been recognized with a great beam top quality Despite having a TEM00 manner beam [4,24], which would be great candidates for the basic in the DUV laser era. One more applicant for the basic would be the substantial-electrical power fiber laser which may be reached by coherent beam mixture with M2 value lower than one.
On one other side, the facility scaling of your NIR laser is yet another factor to raise the common electrical click here power with the 193-nm DUV laser. Mainly because of the insufficient the significant-ability amplification Alternative with the NIR laser (as an example at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) might be applied to produce a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength as well as obtaining relative higher electricity [21]. A short while ago, a diamond Raman laser showed its means in obtaining a large electric power and also a substantial conversion effectiveness at the 1st Stokes with the one-μm laser [22,23], which implies the likelihood to become applied from the 193-nm DUV laser technology because of its high Raman achieve and large frequency shift.
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The beam profile proven in Figure 7b shown a fantastic beam quality as one of several deserves of Raman laser, which might be beneficial to create a 193-nm DUV laser with a top quality beam.
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The event from the 193-nm laser was shown by stages of SFG. In order to scale the DUV laser electric power efficiently, a completely new idea with the 193-nm DUV laser generation is presented determined by the diamond Raman laser.